STS is up

Jeannie Perez jperez at snf.stanford.edu
Tue Jul 10 16:43:45 PDT 2007


STS PECVD is up and ready for a Nitride test. Please remember to coat
the chamber first.

   I've tested the high frequency oxide recipes and it was good.
See log sheet for data information.

Low frequency test was bad. Uniformity across the wafer was greater than 12%.
Thanks for your patience,



Jeannie Perez
Science and Engineering Technician
Stanford Nanofabrication Facility
Stanford University
Tel: (650) 723-7997
Fax: (650) 725-6278





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