STS is up
jperez at snf.stanford.edu
Tue Jul 10 16:43:45 PDT 2007
STS PECVD is up and ready for a Nitride test. Please remember to coat
the chamber first.
I've tested the high frequency oxide recipes and it was good.
See log sheet for data information.
Low frequency test was bad. Uniformity across the wafer was greater than 12%.
Thanks for your patience,
Science and Engineering Technician
Stanford Nanofabrication Facility
Tel: (650) 723-7997
Fax: (650) 725-6278
More information about the sts