Do NOT Run Nitride recipes

Jeannie Perez jperez at snf.stanford.edu
Mon Jul 23 14:08:41 PDT 2007


Hi Everyone,
There seems to be fluctuating  reflective power problems with Nitride 
recipes.(from high frequency). Jim Haydon will check and make sure 
wires or connections haven't come off.  I checked two standard 
nitride recipes and they both are having the same problem. I checked 
a high frequency recipe (oxide) and didn't see a problem.
Regards,


Jeannie Perez
Science and Engineering Technician
Stanford Nanofabrication Facility
Stanford University
Tel: (650) 723-7997
Fax: (650) 725-6278





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