STS will be down for a few weeks

Rohan D. Kekatpure rohank at
Fri Jul 27 17:20:25 PDT 2007

Is it possible to allow the system to run high frequency oxide till  
the parts arrive?


----- Message from jperez at ---------
     Date: Fri, 27 Jul 2007 15:20:55 -0700
     From: Jeannie Perez <jperez at>
Reply-To: Jeannie Perez <jperez at>
  Subject: STS will be down for a few weeks
       To: sts at

> Parts are being ordered which will take a week or two. Once Jim
> replaces them, we'll have to condition the chamber many times and start
> running tests.
> Sorry for any inconvenience,
> Jeannie Perez
> Science and Engineering Technician
> Stanford Nanofabrication Facility
> Stanford University
> Tel: (650) 723-7997
> Fax: (650) 725-6278

----- End message from jperez at -----

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