From ycjun at stanford.edu  Wed Jun  6 10:15:49 2007
From: ycjun at stanford.edu (Young Chul Jun)
Date: Wed, 06 Jun 2007 10:15:49 -0700
Subject: reservation released from 1pm today
Message-ID: <20070606101549.6cgdpihjcvgoko4g@webmail.stanford.edu>

I released my slot from 1pm today. (stuck with other stuff. Sorry..)  
STS is available to other users.







From jperez at snf.stanford.edu  Thu Jun 14 12:00:14 2007
From: jperez at snf.stanford.edu (Jeannie Perez)
Date: Thu, 14 Jun 2007 12:00:14 -0700
Subject: New  Information on charges for STS PECVD Cleans
Message-ID: <6.2.5.6.2.20070614115257.01e2f5f8@snf.stanford.edu>

Hello Everyone,

  This is to let STS users know that "Community Service" is no longer 
valid and that YOU should be using "Community Service (STS)" for 
cleans on the STS.  If you do not have this project on the pull-down 
menu, then you should get in touch with me.
Regards,


Jeannie Perez
Science and Engineering Technician
Stanford Nanofabrication Facility
Stanford University
Tel: (650) 723-7997
Fax: (650) 725-6278




From Henry.Yang at hitachigst.com  Thu Jun 14 15:45:01 2007
From: Henry.Yang at hitachigst.com (Henry.Yang at hitachigst.com)
Date: Thu, 14 Jun 2007 15:45:01 -0700
Subject: New  Information on charges for STS PECVD Cleans
In-Reply-To: <6.2.5.6.2.20070614115257.01e2f5f8@snf.stanford.edu>
Message-ID: <OFC35C56AE.F3C633DE-ON882572FA.007CEC8A-882572FA.007CE920@hgst.com>

Hi Jeannie,

I don't have access to the Community Service STS account. Could you add it
for me? Thanks!

Henry




-------------------------------------------------------
Henry Yang
Adversary Engineer
Micro/Nano Fabrication Research
Hitachi San Jose Research Center
Tel: 408-717-5447
-------------------------------------------------------


                                                                           
             Jeannie Perez                                                 
             <jperez at snf.stanf                                             
             ord.edu>                                                   To 
                                       sts at snf.stanford.edu                
             06/14/2007 12:00                                           cc 
             PM                                                            
                                                                   Subject 
                                       New  Information on charges for STS 
                                       PECVD Cleans                        
                                                                           
                                                                           
                                                                           
                                                                           
                                                                           
                                                                           




Hello Everyone,

  This is to let STS users know that "Community Service" is no longer
valid and that YOU should be using "Community Service (STS)" for
cleans on the STS.  If you do not have this project on the pull-down
menu, then you should get in touch with me.
Regards,


Jeannie Perez
Science and Engineering Technician
Stanford Nanofabrication Facility
Stanford University
Tel: (650) 723-7997
Fax: (650) 725-6278






From jperez at snf.stanford.edu  Fri Jun 29 13:20:22 2007
From: jperez at snf.stanford.edu (Jeannie Perez)
Date: Fri, 29 Jun 2007 13:20:22 -0700
Subject: Testing information for use on STS PECVD
Message-ID: <6.2.5.6.2.20070629131541.01e22588@snf.stanford.edu>

System is in the clean cycle, once completed please Test
the system. I will leave wafers in a box for testing. If uniformity
is less than 10% across the wafer, OK to use. Recipes to use for testing are;
std_1kni or std_lfox or std_hfox.
Please leave information in our log sheets.
Thanks,


Jeannie Perez
Science and Engineering Technician
Stanford Nanofabrication Facility
Stanford University
Tel: (650) 723-7997
Fax: (650) 725-6278