Testing information for use on STS PECVD
jperez at snf.stanford.edu
Fri Jun 29 13:20:22 PDT 2007
System is in the clean cycle, once completed please Test
the system. I will leave wafers in a box for testing. If uniformity
is less than 10% across the wafer, OK to use. Recipes to use for testing are;
std_1kni or std_lfox or std_hfox.
Please leave information in our log sheets.
Science and Engineering Technician
Stanford Nanofabrication Facility
Tel: (650) 723-7997
Fax: (650) 725-6278
More information about the sts