Testing information for use on STS PECVD

Jeannie Perez jperez at snf.stanford.edu
Fri Jun 29 13:20:22 PDT 2007


System is in the clean cycle, once completed please Test
the system. I will leave wafers in a box for testing. If uniformity
is less than 10% across the wafer, OK to use. Recipes to use for testing are;
std_1kni or std_lfox or std_hfox.
Please leave information in our log sheets.
Thanks,


Jeannie Perez
Science and Engineering Technician
Stanford Nanofabrication Facility
Stanford University
Tel: (650) 723-7997
Fax: (650) 725-6278





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