From jperez at snf.stanford.edu Thu Mar 1 14:06:25 2007 From: jperez at snf.stanford.edu (Jeannie Perez) Date: Thu, 01 Mar 2007 14:06:25 -0800 Subject: Nitride Recipes are GOOD! Message-ID: <6.2.5.6.2.20070301135423.01dc2588@snf.stanford.edu> First I'd like to apologize for having said "Shut off Argon flow" on Tuesday". We thought only of getting the system to run until Jim Haydon could come in the next day and work on the Argon key. What happen is that someone turned the Nitrogen flow off instead of Argon. This created an error on Nitride recipes, because the first step (of 3 steps) is a nitrogen warm up for one minute. Second step is your deposition set-up and the third step is 16 hour warm down. All nitride recipes are OK! DO NOT Turn off or down Nitrogen or Argon flows. Use only the black toggle switch to turn on Argon for stand-by mode or off to use the system. Any questions please see me. Thanks, Jeannie Jeannie Perez Science and Engineering Technician Stanford Nanofabrication Facility Stanford University Tel: (650) 723-7997 Fax: (650) 725-6278 From kdegreve at stanford.edu Tue Mar 6 19:07:46 2007 From: kdegreve at stanford.edu (Kristiaan De Greve) Date: Tue, 6 Mar 2007 19:07:46 -0800 Subject: problem with loading/venting procedure Message-ID: <1173236866.45ee2c825d4ad@webmail.stanford.edu> Dear STS users, when trying to vent the STS system in order to load my samples, I encountered a problem in that the valve seemed not to open; in any case, I couldn't vent. Here's what I did: * switched off the Ar flow, pressed F3 "vent" and F1 "open valve", and did get the message "venting chamber - please wait"; * however, I couldn't hear the valve open; * waited for about 15 minutes; the chamber lid/base gap hadn't opened - pressing the blue buttons obviously didn't help either. * repeated this procedure (interrupting the former run through 'F1') for 3 more times, but in vain. Being a new user, I didn't risk rebooting, hence I interrupted the last venting cycle, and switched on the Ar flow again. I left the coral status on 'problem'. Does anybody know how to fix this? Many thanks and best regards, Kristiaan De Greve. From bleen at stanford.edu Mon Mar 12 18:45:41 2007 From: bleen at stanford.edu (J. Brian Leen) Date: Mon, 12 Mar 2007 17:45:41 -0800 Subject: Done early Message-ID: STS is now available until 19:30