From yenilmez at stanford.edu  Thu May 10 11:53:13 2007
From: yenilmez at stanford.edu (Erhan Yenilmez)
Date: Thu, 10 May 2007 11:53:13 -0700
Subject: pin hole free nitride
Message-ID: <EE8938CD-BBC4-425D-89BF-17A99CE3095A@stanford.edu>

Dear STS users,

I would like to deposit pin hole free silicon nitride layers of 100nm  
thickness on quartz and 500nm thickness on nitride and platinum. I  
would be happy if you could share your recipes that worked for you.

Best,

Erhan




From jhaydon at stanford.edu  Thu May 17 16:33:24 2007
From: jhaydon at stanford.edu (Jim Haydon)
Date: Thu, 17 May 2007 16:33:24 -0700
Subject: STS low frequency power supply status
Message-ID: <464CE644.9060000@stanford.edu>

STS users

At this point if all goes well the low frequency generator for the STS  
will be ordered on 05/18/07 and we should have it with in couple of 
weeks if there are no hang-ups in purchasing or customs. In the meantime 
I will still try to get the old one working.

Jim Haydon