pin hole free nitride

Erhan Yenilmez yenilmez at stanford.edu
Thu May 10 11:53:13 PDT 2007


Dear STS users,

I would like to deposit pin hole free silicon nitride layers of 100nm  
thickness on quartz and 500nm thickness on nitride and platinum. I  
would be happy if you could share your recipes that worked for you.

Best,

Erhan





More information about the sts mailing list