From nataraj at solexel.com  Thu Aug 21 15:02:28 2008
From: nataraj at solexel.com (Pradeep Nataraj)
Date: Thu, 21 Aug 2008 17:02:28 -0500
Subject: STS Wet Etch Rates
Message-ID: <1235CE34F68C0440AE23BA8F11C3DEA163085D@34093-C3-EVS3.exchange.rackspace.com>


 Dear STS users,
  
Here is the wet etch rates of STS tool.
It is also posted on comment box. 

 Pradeep.

1. HighFrequency Oxide   
 6:1 BOE = 2749A/min  
 20:1 BOE =  817A/min

2. LowFrequency Oxide
 6:1 BOE = 1360A/min  
 20:1 BOE =  197A/min

3. Nitiride Etch rate 
  6:1 BOE= 173A/min
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From ofidaner at yahoo.com  Fri Aug 29 09:13:06 2008
From: ofidaner at yahoo.com (Onur Fidaner)
Date: Fri, 29 Aug 2008 09:13:06 -0700 (PDT)
Subject: sts available until 13:30
Message-ID: <975259.12236.qm@web56103.mail.re3.yahoo.com>