STS Wet Etch Rates

Pradeep Nataraj nataraj at solexel.com
Thu Aug 21 15:02:28 PDT 2008


 Dear STS users,
  
Here is the wet etch rates of STS tool.
It is also posted on comment box. 

 Pradeep.

1. HighFrequency Oxide   
 6:1 BOE = 2749A/min  
 20:1 BOE =  817A/min

2. LowFrequency Oxide
 6:1 BOE = 1360A/min  
 20:1 BOE =  197A/min

3. Nitiride Etch rate 
  6:1 BOE= 173A/min
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