STS PECVD Nitride

Jeannie Perez jperez at snf.stanford.edu
Tue Jan 8 15:40:39 PST 2008


Hi Everyone,
Ed Myers has modified his Recipe on the Woollam and here are the 
results from Mondays test. Deposition Rate isn't as fast as first stated.
Dep. rate for PECVD Nitride is 105 Angstroms per minute. The range 
across the four wafers were less than <2%.
STS PECVD is up.

Jeannie Perez
Science and Engineering Technician
Stanford Nanofabrication Facility
Stanford University
Tel: (650) 723-7997
Fax: (650) 725-6278

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