Deposition rates have dropped, should run a test before processing.
jperez at snf.stanford.edu
Thu Jul 31 13:05:36 PDT 2008
Ran 3 oxide tests today using Hi Freq today. Lili ran three Lo Freq.
Deposition rate has dropped over one hundred angstroms.
Refractive index ok. Average deposition is ~245A/min (oxides). This
was a clean system
Science and Engineering Technician
Stanford Nanofabrication Facility
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