Deposition rates have dropped, should run a test before processing.

Jeannie Perez jperez at snf.stanford.edu
Thu Jul 31 13:05:36 PDT 2008


Ran 3 oxide tests today using Hi Freq today. Lili ran three Lo Freq. 
tests yesterday.

Deposition rate has dropped over one hundred angstroms.
Refractive index ok. Average deposition is ~245A/min (oxides). This 
was a clean system


Jeannie Perez
Science and Engineering Technician
Stanford Nanofabrication Facility
Stanford University
Tel: (650) 723-7997
Fax: (650) 725-6278





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