From rcordova at kovio.com Wed Jun 18 06:43:47 2008 From: rcordova at kovio.com (Rosie Cordova) Date: Wed, 18 Jun 2008 06:43:47 -0700 Subject: STS PECVD is in clean, Message-ID: <0A734412B02624499172B7366A97336B1059056F03@server.print-this.com> Good morning STS community, I left the system in the first portion of clean cycle yesterday. It had several RF tolerance errors in the first platen clean. I would like to ask, if anyone is around this morning, to help with the clean and check to see that if it errors out to please "resume" so it can continue. I will be there in the afternoon to use it, but would like some help in getting it through the steps required. I will take up whereever it is when I arrive. Also, remember to log the errors on the sheet that Jeannie has placed on the system. I appreciate your help in advance! Rosie Cordova From david.druist at grandisinc.com Wed Jun 18 16:13:04 2008 From: david.druist at grandisinc.com (david.druist at grandisinc.com) Date: Wed, 18 Jun 2008 16:13:04 -0700 Subject: STS PECVD free Thursday morning Message-ID: Wafers are not ready. Sorry for the late notice, we had a tool down unexpectedly at our company's site. Regards, David Druist Memory Process and Device Integration Grandis, Inc. (408) 945-2168 David.Druist at GrandisInc.com From lwchang at stanford.edu Sat Jun 21 01:08:49 2008 From: lwchang at stanford.edu (Li-Wen Chang) Date: Sat, 21 Jun 2008 01:08:49 -0700 Subject: STS PECVD is in clean, In-Reply-To: <0A734412B02624499172B7366A97336B1059056F03@server.print-this.com> References: <0A734412B02624499172B7366A97336B1059056F03@server.print-this.com> Message-ID: <8ab79e460806210108h41cc01c5o9992d5aecbf6452d@mail.gmail.com> Hi, I left the system in the first portion of the clean cycle. Please help to complete the clean cycle. Thanks! Li-Wen