From tdo at stanford.edu Tue May 6 23:53:41 2008 From: tdo at stanford.edu (Thomas O'Sullivan) Date: Tue, 06 May 2008 23:53:41 -0700 Subject: wednesday 10am-noon Message-ID: <482151F5.8000305@stanford.edu> sample not ready due to other equipment problems. sorry for the late notice. From jperez at snf.stanford.edu Mon May 12 14:41:53 2008 From: jperez at snf.stanford.edu (Jeannie Perez) Date: Mon, 12 May 2008 14:41:53 -0700 Subject: Log Sheets NOT being filled OUT on STS PECVD Message-ID: <6.2.5.6.2.20080512141455.01d6d138@snf.stanford.edu> Hi STS PECVD Users, Looking through STS log sheets, more than half are not filling out the log sheets properly. I want you to at least fill out the top portion of the log sheet. Trying to train new users how to read the log sheets is important, but if we can't tell what you've done than we can make mistakes on our samples. Example; if someone wanted to run nitride and didn't read the log sheet correctly and didn't coat the chamber with nitride first, they would of deposited something other than nitride. Sometimes I can't make out if you ran a nitride or oxide dep. by your recipe name, so it helps me to see the gases used, or the frequency that was filled out. So all parameters from your recipe(s) must now be logged on our runsheets. Any questions, please don't hesitate to ask. Jeannie Perez Science and Engineering Technician Stanford Nanofabrication Facility Stanford University Tel: (650) 723-7997 Fax: (650) 725-6278 From jperez at snf.stanford.edu Wed May 21 11:03:24 2008 From: jperez at snf.stanford.edu (Jeannie Perez) Date: Wed, 21 May 2008 11:03:24 -0700 Subject: The recipe Library to STS PECVD is full again! Message-ID: <6.2.5.6.2.20080521104452.01dda998@snf.stanford.edu> Hi Everyone, I need STS PECVD Users to give me their recipe name(s) if you want them saved. Other wise I'll start deleting recipes on Tuesday May 27th 2008. What happens when the Library is full and you try creating a new recipe, I believe recipes start to drop off (vanish) . So please do not create any new recipes. Jeannie Perez @>---- Science and Engineering Technician Stanford Nanofabrication Facility Stanford University Tel: (650) 723-7997 Fax: (650) 725-6278 From rcordova at kovio.com Wed May 21 16:09:07 2008 From: rcordova at kovio.com (Rosie Cordova) Date: Wed, 21 May 2008 16:09:07 -0700 Subject: STS in clean, please help to keep it going Message-ID: <0A734412B02624499172B7366A97336B0E1F700515@server.print-this.com> Hi all, I started the clean on STS once again. It is having process tolerance errors during Platen cleans. If anyone happens to be near it tonight, please take a moment to check if there is an error and requires the "F2" Resume key pressed. this will insure that the three hour process continues to the end. If anyone can help get this through any steps it will be very much appreciated. Thanks in advance, Rosie Cordova ________________________________________ From: Jeannie Perez [jperez at snf.stanford.edu] Sent: Wednesday, May 21, 2008 11:03 AM To: sts at snf.stanford.edu Subject: The recipe Library to STS PECVD is full again! Hi Everyone, I need STS PECVD Users to give me their recipe name(s) if you want them saved. Other wise I'll start deleting recipes on Tuesday May 27th 2008. What happens when the Library is full and you try creating a new recipe, I believe recipes start to drop off (vanish) . So please do not create any new recipes. Jeannie Perez @>---- Science and Engineering Technician Stanford Nanofabrication Facility Stanford University Tel: (650) 723-7997 Fax: (650) 725-6278 From nperez at stanford.edu Thu May 22 09:49:04 2008 From: nperez at stanford.edu (Jeannie Perez) Date: Thu, 22 May 2008 09:49:04 -0700 Subject: STS in clean, Completed! In-Reply-To: <0A734412B02624499172B7366A97336B0E1F700515@server.print-th is.com> References: <0A734412B02624499172B7366A97336B0E1F700515@server.print-this.com> Message-ID: <6.2.5.6.2.20080522093736.01d1ac78@stanford.edu> Can anyone tell me if this RF error is happening during all three Platen cleans (etchbak3)? Can you tell me for the whole time during Platen clean? As much information would be appreciated. Jeannie At 04:09 PM 5/21/2008, Rosie Cordova wrote: >Hi all, > >I started the clean on STS once again. It is having process >tolerance errors during Platen cleans. If anyone happens to be near >it tonight, please take a moment to check if there is an error and >requires the "F2" Resume key pressed. this will insure that the >three hour process continues to the end. If anyone can help get >this through any steps it will be very much appreciated. > >Thanks in advance, > >Rosie Cordova > > >________________________________________ >From: Jeannie Perez [jperez at snf.stanford.edu] >Sent: Wednesday, May 21, 2008 11:03 AM >To: sts at snf.stanford.edu >Subject: The recipe Library to STS PECVD is full again! > >Hi Everyone, >I need STS PECVD Users to give me their recipe name(s) if you want >them saved. Other wise I'll start deleting recipes on Tuesday May 27th 2008. >What happens when the Library is full and you try creating a new >recipe, I believe recipes start to drop off (vanish) . So please do >not create any new recipes. > >Jeannie Perez @>---- >Science and Engineering Technician >Stanford Nanofabrication Facility >Stanford University >Tel: (650) 723-7997 >Fax: (650) 725-6278 From jperez at snf.stanford.edu Fri May 23 14:18:10 2008 From: jperez at snf.stanford.edu (Jeannie Perez) Date: Fri, 23 May 2008 14:18:10 -0700 Subject: STS PECVD ERROR LOG Message-ID: <6.2.5.6.2.20080523135957.01d35a00@snf.stanford.edu> Hi All STS Users, Jim Haydon needs more precise information when STS PECVD RF errors occur. I've attached an ERROR LOG on the plastic (cabinet) above the manual Argon toggle switch. It seems that the RF errors are occurring during ETCHBAK3. We need to know which step / cycle in this recipe or any recipe that a error occurs. The information needed in on the "error log sheet", along with an example. Thank you ALL, Have a wonderful Memorial weekend! Jeannie Perez Science and Engineering Technician Stanford Nanofabrication Facility Stanford University Tel: (650) 723-7997 Fax: (650) 725-6278