From fanpy839 at stanford.edu Fri Apr 3 10:52:55 2009 From: fanpy839 at stanford.edu (Pengyu Fan) Date: Fri, 3 Apr 2009 10:52:55 -0700 Subject: Deposition over Nanowire and etc. Message-ID: <200904031052554533082@stanford.edu> Hi All, I'd like to deposit a passivation layer of oxide or nitride over silicon substrate with nanowires and metallic patterns on it. The ideal thickness of the layer would be comparable and a bit larger than the diameter of the nanowires or the thickness of the metallic patterns (20~30 nm). If anyone has done similar process with STS before, could you tell me the layer you deposited is flat and smoothly covering everywhere OR it has bumps on top of where the nanowires or metallic patterns are? Thank you very much. Cheers, Pengyu 2009-04-03 Pengyu Fan PhD student, Materials Science & Engineering, Stanford University, Stanford, CA BS in Physics 2008, School of Physics, Peking University, Beijing, China -------------- next part -------------- An HTML attachment was scrubbed... URL: From takane at stanford.edu Fri Apr 10 20:28:28 2009 From: takane at stanford.edu (Takane Usui) Date: Fri, 10 Apr 2009 20:28:28 -0700 Subject: STS Clean Cycle Message-ID: <49E00E5C.9060505@stanford.edu> STS Users, I just started the clean cycle. It is now running "Etchbak3". Next user, or whoever around in the lab, please continue... Thank you. Takane From takane at stanford.edu Fri Apr 17 11:15:51 2009 From: takane at stanford.edu (Takane Usui) Date: Fri, 17 Apr 2009 11:15:51 -0700 (PDT) Subject: STS PECVD Released this afternoon Message-ID: <1562175679.1242501239992151431.JavaMail.root@zm03.stanford.edu> I released 1:30p-4p since my batch from last night turned out to be enough for my experiment. Thank you. -Takane