From mferrier at stanford.edu Wed Dec 9 15:45:35 2009 From: mferrier at stanford.edu (Marlene Ferrier) Date: Wed, 9 Dec 2009 15:45:35 -0800 (PST) Subject: 250C deposition in STS Message-ID: <1786281223.1069311260402335011.JavaMail.root@zm08.stanford.edu> Dear labmembers, I am interested in running low temperature (250C) deposition in STS (both nitride and oxide) If you have some experience with that I would really appreciate if you could provide me with some feedback. Best regards, Marlene From oguz.h.elibol at intel.com Thu Dec 10 13:18:57 2009 From: oguz.h.elibol at intel.com (Elibol, Oguz H) Date: Thu, 10 Dec 2009 13:18:57 -0800 Subject: STS PECVD Free today 13:30 to 16:30 - Thanks... Message-ID: <88D294E28D20D84C9350E231A79B0E639EA245DB@orsmsx506.amr.corp.intel.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: From mferrier at stanford.edu Thu Dec 10 15:38:51 2009 From: mferrier at stanford.edu (Marlene Ferrier) Date: Thu, 10 Dec 2009 15:38:51 -0800 (PST) Subject: STS Released 4:30pm Message-ID: <847120424.1350221260488331170.JavaMail.root@zm08.stanford.edu>