250C deposition in STS

Marlene Ferrier mferrier at stanford.edu
Wed Dec 9 15:45:35 PST 2009


Dear labmembers,

I am interested in running low temperature (250C) deposition in STS (both nitride and oxide)
If you have some experience with that I would really appreciate if you could provide me with some feedback.

Best regards,

Marlene



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