Silane gas purge is sticking, OK after 3 minutes to abort.

Jeannie Perez jperez at snf.stanford.edu
Tue Jun 23 15:36:17 PDT 2009

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Jim Haydon will work on STS.

Jeannie Perez
Science and Engineering Technician
Stanford Nanofabrication Facility
Stanford University
Tel: (650) 723-7997
Fax: (650) 725-6278

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