From tdo at stanford.edu  Thu Nov 12 15:50:34 2009
From: tdo at stanford.edu (Thomas O'Sullivan)
Date: Thu, 12 Nov 2009 15:50:34 -0800
Subject: STS low temp dep
Message-ID: <4AFC9F4A.5050608@stanford.edu>

Hi STS-users,
I'm trying to gauge how many SNF users are (or will be) interested in 
low-temperature PECVD processes.  If you run a low temperature process 
on STS currently (or thinking about it), would you mind letting me 
know?  This information will help guide the process towards acquiring 
another PECVD tool.

Thanks,
Tom


From dgrbovic at snf.stanford.edu  Fri Nov 13 00:05:03 2009
From: dgrbovic at snf.stanford.edu (Dragoslav Grbovic)
Date: Fri, 13 Nov 2009 00:05:03 -0800
Subject: STS low temp dep
In-Reply-To: <4AFC9F4A.5050608@stanford.edu>
References: <4AFC9F4A.5050608@stanford.edu>
Message-ID: <6b5c2ea50911130005o7cf6393fvf6544743a32219c7@mail.gmail.com>

Hi Tom,
I would be interested in low temperature PECVD.
Drago Grbovic

On Thu, Nov 12, 2009 at 3:50 PM, Thomas O'Sullivan <tdo at stanford.edu> wrote:

> Hi STS-users,
> I'm trying to gauge how many SNF users are (or will be) interested in
> low-temperature PECVD processes.  If you run a low temperature process on
> STS currently (or thinking about it), would you mind letting me know?  This
> information will help guide the process towards acquiring another PECVD
> tool.
>
> Thanks,
> Tom
>
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From mtang at stanford.edu  Tue Nov 17 08:45:58 2009
From: mtang at stanford.edu (Mary Tang)
Date: Tue, 17 Nov 2009 08:45:58 -0800
Subject: Uniformity on sts dep?
Message-ID: <4B02D346.1030708@stanford.edu>

Dear sts dep users:

"ehe" has reported this several times in the past few weeks, but 
staff-run qual tests have not observed the same problems.  It may very 
well be that the qual tests do not test the same process and 
conditions.   Does anyone else have uniformity data to share?  Recent or 
historical -- it would be appreciated.


Thanks,


Mary

-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu



From chen0622 at yahoo.com  Mon Nov 23 08:05:43 2009
From: chen0622 at yahoo.com (c.c.)
Date: Mon, 23 Nov 2009 08:05:43 -0800 (PST)
Subject: reservation released today and tomorrow 
Message-ID: <161673.81995.qm@web56802.mail.re3.yahoo.com>

Upstream tool down so delayed the process.? Very sorry for late annoucement.? 
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