STS low temp dep

Thomas O'Sullivan tdo at stanford.edu
Thu Nov 12 15:50:34 PST 2009


Hi STS-users,
I'm trying to gauge how many SNF users are (or will be) interested in 
low-temperature PECVD processes.  If you run a low temperature process 
on STS currently (or thinking about it), would you mind letting me 
know?  This information will help guide the process towards acquiring 
another PECVD tool.

Thanks,
Tom



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