STS low temp dep

Thomas O'Sullivan tdo at
Thu Nov 12 15:50:34 PST 2009

Hi STS-users,
I'm trying to gauge how many SNF users are (or will be) interested in 
low-temperature PECVD processes.  If you run a low temperature process 
on STS currently (or thinking about it), would you mind letting me 
know?  This information will help guide the process towards acquiring 
another PECVD tool.


More information about the sts mailing list