STS low temp dep

Dragoslav Grbovic dgrbovic at
Fri Nov 13 00:05:03 PST 2009

Hi Tom,
I would be interested in low temperature PECVD.
Drago Grbovic

On Thu, Nov 12, 2009 at 3:50 PM, Thomas O'Sullivan <tdo at> wrote:

> Hi STS-users,
> I'm trying to gauge how many SNF users are (or will be) interested in
> low-temperature PECVD processes.  If you run a low temperature process on
> STS currently (or thinking about it), would you mind letting me know?  This
> information will help guide the process towards acquiring another PECVD
> tool.
> Thanks,
> Tom
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