Uniformity on sts dep?

Mary Tang mtang at stanford.edu
Tue Nov 17 08:45:58 PST 2009

Dear sts dep users:

"ehe" has reported this several times in the past few weeks, but 
staff-run qual tests have not observed the same problems.  It may very 
well be that the qual tests do not test the same process and 
conditions.   Does anyone else have uniformity data to share?  Recent or 
historical -- it would be appreciated.



Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at stanford.edu

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