From sishikaw at stanford.edu Tue Sep 1 00:51:39 2009 From: sishikaw at stanford.edu (sishikaw) Date: Tue, 1 Sep 2009 00:51:39 -0700 Subject: STS PECVD free from now References: <664255467.11386801247702322316.JavaMail.root@zm03.stanford.edu> Message-ID: <004c01ca2ad9$0a046350$532242ab@CMC.mel.toshiba.co.jp> I finished early. From ludwig at netcrystalinc.com Wed Sep 2 12:05:34 2009 From: ludwig at netcrystalinc.com (Ludwig Galambos) Date: Wed, 2 Sep 2009 12:05:34 -0700 Subject: release STS-PECVD, Thurs. 2-3:30PM Message-ID: <006501ca2c00$5ab453f0$101cfbd0$@com> Release STS-PECVD on Thursday, Sept. 3 from 2pm to 3:30PM -------------- next part -------------- An HTML attachment was scrubbed... URL: From jrjain at stanford.edu Wed Sep 2 20:23:13 2009 From: jrjain at stanford.edu (Raja Jain) Date: Wed, 2 Sep 2009 20:23:13 -0700 Subject: STS PECVD free at 9pm Message-ID: <019101ca2c45$df4f6b50$9dee41f0$@edu> Upstream equipment having problems. Apologies for late notice. Clean procedure is apparently in process. -------------- next part -------------- An HTML attachment was scrubbed... URL: From sishikaw at stanford.edu Thu Sep 3 15:18:46 2009 From: sishikaw at stanford.edu (sishikaw) Date: Thu, 3 Sep 2009 15:18:46 -0700 Subject: STS PECVD free from now References: <019101ca2c45$df4f6b50$9dee41f0$@edu> Message-ID: <003101ca2ce4$8101e0b0$e65540ab@CMC.mel.toshiba.co.jp> sorry for late notice, my samples are not ready. -------------- next part -------------- An HTML attachment was scrubbed... URL: From jrjain at stanford.edu Sun Sep 6 14:38:23 2009 From: jrjain at stanford.edu (Raja Jain) Date: Sun, 6 Sep 2009 14:38:23 -0700 Subject: sts pecvd free at 5pm Message-ID: <004901ca2f3a$5cad7280$16085780$@edu> Will finish early -------------- next part -------------- An HTML attachment was scrubbed... URL: From oguz.h.elibol at intel.com Mon Sep 7 23:26:07 2009 From: oguz.h.elibol at intel.com (Elibol, Oguz H) Date: Mon, 7 Sep 2009 23:26:07 -0700 Subject: Help with Quartz in STS PECVD Message-ID: <88D294E28D20D84C9350E231A79B0E6396A1FE5F@orsmsx506.amr.corp.intel.com> Hi All, I am trying to deposit PECVD nitride on a quartz wafer patterned with Ti/Au. When I placed the quartz wafer on the plate, the wafer cracked due to thermal shock. I don't have any experience in processing quartz wafers, but I assume one easy way of fixing the problem is to bring down the temperature and ramp it up slowly to 350 C after placing the wafer at room temperature. If anyone has experience processing quartz substrates in the PECVD could you please share your experience with me? Thanks, Oguz -------------- next part -------------- An HTML attachment was scrubbed... URL: