From fanpy839 at stanford.edu Sat Apr 3 12:14:53 2010 From: fanpy839 at stanford.edu (Pengyu Fan) Date: Sat, 3 Apr 2010 12:14:53 -0700 Subject: sts free 1pm Message-ID: sorry for the late notice -- Pengyu Fan Materials Science & Engineering Stanford University -------------- next part -------------- An HTML attachment was scrubbed... URL: From jrjain at stanford.edu Mon Apr 5 16:12:01 2010 From: jrjain at stanford.edu (Raja Jain) Date: Mon, 5 Apr 2010 16:12:01 -0700 Subject: stspecvd free at 5pm Message-ID: <00c801cad515$65e0eef0$31a2ccd0$@edu> Taking another reservation. Apologies for late change. -------------- next part -------------- An HTML attachment was scrubbed... URL: From chienyuc at stanford.edu Fri Apr 9 20:33:29 2010 From: chienyuc at stanford.edu (Chien-Yu Chen) Date: Fri, 9 Apr 2010 20:33:29 -0700 (PDT) Subject: sts reservation release Apr 9 2130-0100 Message-ID: <2107293380.4486321270870409761.JavaMail.root@zm03.stanford.edu> samples are not ready. From alexneu at stanford.edu Fri Apr 30 13:31:26 2010 From: alexneu at stanford.edu (Alex Neuhausen) Date: Fri, 30 Apr 2010 13:31:26 -0700 Subject: Pits in PECVD oxide on Au Message-ID: Hi STS users, I'm trying to put a 50 nm PECVD oxide on top of Ti/Au traces (5/25 nm). The oxide on top of bare wafer is fine, but the area on top of the Au is covered with pits, as confirmed with AFM and optical microscope. The pits are roughly 0.5 um diameter and spaced every few um. I've reduced my process to simply cleaning a chip, evaporating unpatterned metal, an oxygen plasma RIE to clean any organics, and immediate transfer to the STS and I still see pitting. Because the pits are localized to the Au and I've tried to eliminate any contamination, I have a theory that this is caused by thermal stress between the Ti/Au and surrounding oxide. Is anyone else using the STS to put oxide on top of gold and have you had any problems? Thanks, Alex Alex Neuhausen PhD Candidate Electrical Engineering Goldhaber-Gordon Lab 476 Lomita Mall Stanford, CA 94305 Office: 650-725-2047 Cell: 650-776-5672 -------------- next part -------------- An HTML attachment was scrubbed... URL: