From chen0622 at yahoo.com Tue Aug 24 09:06:13 2010 From: chen0622 at yahoo.com (c.c.) Date: Tue, 24 Aug 2010 09:06:13 -0700 (PDT) Subject: sts PECVD reservation released from 1:30 PM to 4:00 PM Message-ID: <723244.41799.qm@web56803.mail.re3.yahoo.com> sample not ready due to upstream tool shutdown. -------------- next part -------------- An HTML attachment was scrubbed... URL: From roberth at quswami.com Wed Aug 25 14:22:27 2010 From: roberth at quswami.com (Robert Huang) Date: Wed, 25 Aug 2010 14:22:27 -0700 Subject: sts free today 5:30-9PM and tomorrow 8:30AM-2PM... Message-ID: <3F24868DDBDC7B46B2289E33B58C4CB11FA35765DC@QUSWAMI-DSRV1.quswami.local> Just deleted my reservations for these 2 time slots - upstream tool problems. Robert -------------- next part -------------- An HTML attachment was scrubbed... URL: From nperez at stanford.edu Mon Aug 30 15:33:49 2010 From: nperez at stanford.edu (Jeannie Perez) Date: Mon, 30 Aug 2010 15:33:49 -0700 Subject: Test done after 2% Silane bottle change 8/30/10 Message-ID: <4C7C31CD.3010401@stanford.edu> Hi Everyone, Here are the results of today's test after 2% bottle change at STS PECVD. Ran two test wafers using std_1kni. Both TWs gave me the same results 90 A/ min deposition rate. Index of refraction 1.95. Decided to run another nitride test because the previous user log wasn't clear. Second nitride test was close to the first test., but close to what I am accustom of seeing. 93 A/min and index of refraction 1.965. I did an oxide low frequency test . Results 360A/ min with IR 1.47 OK to use. -------------- next part -------------- A non-text attachment was scrubbed... Name: nperez.vcf Type: text/x-vcard Size: 346 bytes Desc: not available URL: From alexneu at stanford.edu Mon Aug 30 19:23:02 2010 From: alexneu at stanford.edu (Alex Neuhausen) Date: Mon, 30 Aug 2010 19:23:02 -0700 Subject: what's with all these 18+ hour signups for the STS? Message-ID: I'm genuinely curious. Fungus, jrjain and zpatel, what do you do during an 18-24 hour session on the STS? 4 microns of oxide each on a case full of 6 inch wafers? -------------- next part -------------- An HTML attachment was scrubbed... URL: From damodei at princeton.edu Mon Aug 30 19:34:09 2010 From: damodei at princeton.edu (Dario Amodei) Date: Mon, 30 Aug 2010 19:34:09 -0700 Subject: what's with all these 18+ hour signups for the STS? In-Reply-To: References: Message-ID: <4C7C6A21.8020504@princeton.edu> I am curious about this as well. Is there any chance I could use the machine for 20 minutes (5500 A of high-frequency oxide) sometime in the next two days? It is a very short deposition and it is holding up my entire process. I tried to do my deposition last night but got the now-infamous silane error. Zpatel, fungus? Alex Neuhausen wrote: > I'm genuinely curious. Fungus, jrjain and zpatel, what do you do > during an 18-24 hour session on the STS? 4 microns of oxide each on a > case full of 6 inch wafers? From grahamab at stanford.edu Mon Aug 30 19:39:17 2010 From: grahamab at stanford.edu (Andrew Blake Graham) Date: Mon, 30 Aug 2010 19:39:17 -0700 (PDT) Subject: what's with all these 18+ hour signups for the STS? In-Reply-To: Message-ID: <1584632068.456449.1283222357193.JavaMail.root@zm06.stanford.edu> maybe you can start by emailing them individually rather than spamming the entire list. I know from talking to the person (they are people) that at least one of them has a very good reason for making such long reservations. ----- Original Message ----- From: "Alex Neuhausen" To: sts at snf.stanford.edu Sent: Monday, August 30, 2010 7:23:02 PM Subject: what's with all these 18+ hour signups for the STS? I'm genuinely curious. Fungus, jrjain and zpatel, what do you do during an 18-24 hour session on the STS? 4 microns of oxide each on a case full of 6 inch wafers? From nperez at stanford.edu Tue Aug 31 08:27:54 2010 From: nperez at stanford.edu (Jeannie Perez) Date: Tue, 31 Aug 2010 08:27:54 -0700 Subject: Reservation hours and Clean process on STS PECVD Message-ID: <4C7D1F7A.8010908@stanford.edu> Hi Everyone, I don't know if this is why you've reserved so much time on STS PECVD. First the answer is yes you can make STS PECVD A CLEAN tool, but you have to have additional training. I have a check off list with instructions on how to clean the system and you have to _return_ the sheet back to me each and every time the equipment becomes a clean tool. The other thing is that you can't do this process during prime time only. We limit you or anyone else to no more than four hours during prime time (8AM to 6PM). If you need six hours, at least two of the six hours has to be on off hours. Example 6AM until noon or 2 PM until 8 PM. *BRING SYSTEM UP AS A CLEAN TOOL*: 1)Staff needs to OK the equipment you plan on using after going through STS Clean tool 2) you need additional training 3) pick up a check off list for this clean from me or Ed Myers 4) need to check out clean box with clean tools for this clean process 5) need to return check off list back to me or Ed. This is to be done each and ever time you want (STS PECVD) to run a clean process! Please adjust your reservations, Jeannie -------------- next part -------------- A non-text attachment was scrubbed... Name: nperez.vcf Type: text/x-vcard Size: 346 bytes Desc: not available URL: From dinh at kaiamcorp.com Tue Aug 31 17:34:33 2010 From: dinh at kaiamcorp.com (Dinh Ton) Date: Tue, 31 Aug 2010 17:34:33 -0700 Subject: Reservation hours and Clean process on STS PECVD In-Reply-To: <23509_1283268486_4C7D1F7C_23509_95_1_4C7D1F7A.8010908@stanford.edu> References: <23509_1283268486_4C7D1F7C_23509_95_1_4C7D1F7A.8010908@stanford.edu> Message-ID: Hi Y'all During this period of heavy usage, please be considerate to other users : a) If you don't use your time, please send a note. b) if you THINK you will finish early and have a lot of time left -- please let others know. If you reserved for 5 hrs and when you put your wafers in -- you only need 2 hrs -- please DO send a message. I & others might need to get in to do a short run if it's available. Best regards, Dinh Ton On 8/31/10, Jeannie Perez wrote: > Hi Everyone, > I don't know if this is why you've reserved so much time on STS PECVD. > First the answer is yes you can make STS PECVD A CLEAN tool, but you > have to have additional training. I have a check off list with > instructions on how to clean the system and you have to _return_ the > sheet back to me each and every time the equipment becomes a clean > tool. The other thing is that you can't do this process during prime > time only. We limit you or anyone else to no more than four hours during > prime time (8AM to 6PM). If you need six hours, at least two of the six > hours has to be on off hours. > Example 6AM until noon or 2 PM until 8 PM. > > *BRING SYSTEM UP AS A CLEAN TOOL*: > 1)Staff needs to OK the equipment you plan on using after going through > STS Clean tool > 2) you need additional training > 3) pick up a check off list for this clean from me or Ed Myers > 4) need to check out clean box with clean tools for this clean process > 5) need to return check off list back to me or Ed. > This is to be done each and ever time you want (STS PECVD) to run a > clean process! > > Please adjust your reservations, > Jeannie >