Test done after 2% Silane bottle change 8/30/10
nperez at stanford.edu
Mon Aug 30 15:33:49 PDT 2010
Here are the results of today's test after 2% bottle change at STS PECVD.
Ran two test wafers using std_1kni. Both TWs gave me the same
results 90 A/ min deposition rate. Index of refraction 1.95.
Decided to run another nitride test because the previous user log
wasn't clear. Second nitride test was close to the first test., but close to what I am accustom of seeing. 93 A/min and index of refraction 1.965.
I did an oxide low frequency test . Results 360A/ min with IR 1.47
OK to use.
-------------- next part --------------
A non-text attachment was scrubbed...
Size: 346 bytes
Desc: not available
More information about the sts