From chen0622 at yahoo.com Wed Feb 17 10:53:33 2010 From: chen0622 at yahoo.com (c.c.) Date: Wed, 17 Feb 2010 10:53:33 -0800 (PST) Subject: reservation released 8:30 AM t0 12:30 AM, Thurs. (02/18) Message-ID: <866709.92273.qm@web56803.mail.re3.yahoo.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: From chen0622 at yahoo.com Fri Feb 19 12:37:39 2010 From: chen0622 at yahoo.com (c.c.) Date: Fri, 19 Feb 2010 12:37:39 -0800 (PST) Subject: STS PECVD cleaning cycle started Message-ID: <154105.85086.qm@web56801.mail.re3.yahoo.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: From mtang at stanford.edu Sun Feb 21 05:20:15 2010 From: mtang at stanford.edu (Mary Tang) Date: Sun, 21 Feb 2010 05:20:15 -0800 Subject: Warning: No CF4 gas Message-ID: <4B81330F.8080509@stanford.edu> Apologies everyone, but it looks like the CF4 cylinder has run dry. This affects drytek1/2, mrc, p5000etch, pquest, sts (dep) and lampoly. We will address this as soon as possible. Your SNF Staff -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From jiazhu at stanford.edu Mon Feb 22 10:56:53 2010 From: jiazhu at stanford.edu (Jia Zhu) Date: Mon, 22 Feb 2010 10:56:53 -0800 (PST) Subject: 11am - 1pm release Message-ID: <327910587.1070611266865013432.JavaMail.root@zm01.stanford.edu> Sorry for the late notice. From mtang at stanford.edu Mon Feb 22 13:21:47 2010 From: mtang at stanford.edu (Mary Tang) Date: Mon, 22 Feb 2010 13:21:47 -0800 Subject: Warning: No CF4 gas In-Reply-To: <4B81330F.8080509@stanford.edu> References: <4B81330F.8080509@stanford.edu> Message-ID: <4B82F56B.1020204@stanford.edu> Hi all -- The CF4 cylinder has been replaced. Although the cylinder change is routine and no problems are anticipated, staff have not yet run etch rates. Please check before running your critical material and let us know if you observe problems. Your SNF Staff Mary Tang wrote: > Apologies everyone, but it looks like the CF4 cylinder has run dry. > This affects drytek1/2, mrc, p5000etch, pquest, sts (dep) and > lampoly. We will address this as soon as possible. > > Your SNF Staff > > -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu