From chen0622 at yahoo.com Tue Jan 12 09:44:35 2010 From: chen0622 at yahoo.com (c.c.) Date: Tue, 12 Jan 2010 09:44:35 -0800 (PST) Subject: reservation released 10:00 to 12:30PM Message-ID: <505205.47024.qm@web56808.mail.re3.yahoo.com> Very sorry for late announce. -------------- next part -------------- An HTML attachment was scrubbed... URL: From chen0622 at yahoo.com Wed Jan 13 12:38:30 2010 From: chen0622 at yahoo.com (c.c.) Date: Wed, 13 Jan 2010 12:38:30 -0800 (PST) Subject: STS PECVD cleaning cycle start Message-ID: <843498.14791.qm@web56804.mail.re3.yahoo.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: From David.Druist at grandisinc.com Wed Jan 13 14:21:56 2010 From: David.Druist at grandisinc.com (David Druist) Date: Wed, 13 Jan 2010 14:21:56 -0800 Subject: Thursday afternoon 1/13 STS free Message-ID: Problems with upstream equipment- reservation deleted. David Druist Memory Process and Device Integration Grandis, Inc. 408-390-5381 David.Druist at GrandisInc.com -------------- next part -------------- An HTML attachment was scrubbed... URL: From pradeep.nataraj at gmail.com Sun Jan 31 20:58:48 2010 From: pradeep.nataraj at gmail.com (Pradeep Nataraj) Date: Sun, 31 Jan 2010 20:58:48 -0800 Subject: AFM roughness for STS Ox and Nit In-Reply-To: <4d185dc91001312057r31e2246aha76de268ef3229d3@mail.gmail.com> References: <4d185dc91001312057r31e2246aha76de268ef3229d3@mail.gmail.com> Message-ID: <4d185dc91001312058s5aebd4bev2d2250c387f541cf@mail.gmail.com> > > Here are the AFM Roughness *( Rq in pics) * > > 1. High Freq Oxide = 0.92 nm > 2. Low Freq Oxide = 0.62 nm > 3. Nitride = 0.4 nm > > The AFM roughness for PECVD published results are around 0.75 nm to 0.9 nm, > so we are pretty close. > Also the Low Freq recipe was dedicated to yield low roughness and it is > doing it ( around 0.6nm). > > If you have any questions, please let me know. > > Enjoy > > *Pradeep* > -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: High_freq_Oxid_3D.jpg Type: image/jpeg Size: 76680 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: High_freq_Oxid_roughness.jpg Type: image/jpeg Size: 110464 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Low_freq_Oxid_3D.jpg Type: image/jpeg Size: 76482 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Low_freq_Oxid_roughness.jpg Type: image/jpeg Size: 98529 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Nitride_3D.jpg Type: image/jpeg Size: 76574 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Nitride_roughness.jpg Type: image/jpeg Size: 106668 bytes Desc: not available URL: