AFM roughness for STS Ox and Nit

Pradeep Nataraj pradeep.nataraj at gmail.com
Sun Jan 31 20:58:48 PST 2010


>
> Here are the AFM Roughness *( Rq in pics) *
>
> 1. High Freq Oxide = 0.92 nm
> 2. Low Freq Oxide = 0.62 nm
> 3. Nitride = 0.4 nm
>
> The AFM roughness for PECVD published results are around 0.75 nm to 0.9 nm,
> so we are pretty close.
> Also the Low Freq recipe was dedicated to yield low roughness and it is
> doing it ( around 0.6nm).
>
> If you have any questions, please let me know.
>
> Enjoy
>
> *Pradeep*
>
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