System shutdown

Altamash Janjua altamash at stanford.edu
Wed May 5 11:11:18 PDT 2010

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Chamber not pumping down below 35 mtorr to get to 12mtorr as previous user commented. Now the system is stuck in standby mode.

Previous message: Pits in PECVD oxide on Au
Next message: finished early and canceled tomorrow 2-830pm
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