Au films in sts pecvd
jprovine at stanford.edu
Wed Oct 6 15:38:11 PDT 2010
hello sts users,
i was wondering if anyone does oxide depositions with gold films on the
surface of their substrate. in particular moderate thickness films (100nm)
with an adhesion layer. i would be interested if there have been any issues
related to the process and temperature thereof.
-------------- next part --------------
An HTML attachment was scrubbed...
More information about the sts