Au films in sts pecvd

J Provine jprovine at stanford.edu
Wed Oct 6 15:38:11 PDT 2010


hello sts users,
i was wondering if anyone does oxide depositions with gold films on the
surface of their substrate.  in particular moderate thickness films (100nm)
with an adhesion layer.  i would be interested if there have been any issues
related to the process and temperature thereof.
thanks,
j
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/sts/attachments/20101006/724df096/attachment.html>


More information about the sts mailing list