Au films in sts pecvd

J Provine jprovine at
Wed Oct 6 15:38:11 PDT 2010

hello sts users,
i was wondering if anyone does oxide depositions with gold films on the
surface of their substrate.  in particular moderate thickness films (100nm)
with an adhesion layer.  i would be interested if there have been any issues
related to the process and temperature thereof.
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <>

More information about the sts mailing list