From kcbalram at stanford.edu Tue Apr 5 17:50:13 2011 From: kcbalram at stanford.edu (Krishna Coimbatore Balram) Date: Tue, 5 Apr 2011 17:50:13 -0700 (PDT) Subject: STS free till midnight Message-ID: <588087475.38923.1302051013065.JavaMail.root@zm06.stanford.edu> Picked up a slot later in the week Krishna From chienyuc at stanford.edu Mon Apr 18 17:46:07 2011 From: chienyuc at stanford.edu (Chien-Yu Chen) Date: Mon, 18 Apr 2011 17:46:07 -0700 (PDT) Subject: Reservation released today now to 1930 Message-ID: <1404613139.57011.1303173967366.JavaMail.root@zm03.stanford.edu> Earlier started and finished. From dwnam at stanford.edu Tue Apr 19 22:35:58 2011 From: dwnam at stanford.edu (Donguk Nam) Date: Tue, 19 Apr 2011 22:35:58 -0700 Subject: Sts is free from now till 2am Message-ID: Low frequency is needed for nitride deposition. Sorry for the late notice. Donguk -------------- next part -------------- An HTML attachment was scrubbed... URL: From nperez at stanford.edu Wed Apr 27 10:29:01 2011 From: nperez at stanford.edu (Jeannie Perez) Date: Wed, 27 Apr 2011 10:29:01 -0700 Subject: STS PECVD Up-date, Message-ID: <4DB8525D.8020803@stanford.edu> The part ordered for STS wasn't working, didn't work or burned out during installation, so another part for the contactor is on order and should be here by Friday. At this time maintenance isn't sure if the part ordered will fix the problem with the low frequency. He's working without a schematic drawing to assist in the repair. Once the STS PECVD system is back-up, a clean cycle (6/7 steps) will need to be done, followed by a test. Sorry for any inconvenience, Jeannie -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: nperez.vcf Type: text/x-vcard Size: 346 bytes Desc: not available URL: