STS PECVD Up-date,

Jeannie Perez nperez at stanford.edu
Wed Apr 27 10:29:01 PDT 2011


The part ordered for STS wasn't working, didn't work or burned out 
during installation, so another  part for the contactor is on order and 
should be here by Friday. At this time maintenance isn't sure if the 
part ordered will fix the problem with the low frequency. He's working 
without a schematic drawing to assist in
the repair. Once the STS PECVD system is back-up, a clean cycle (6/7 
steps) will need to be done, followed by a test.
Sorry for any inconvenience,
Jeannie


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