From nperez at stanford.edu  Tue Aug  2 15:11:05 2011
From: nperez at stanford.edu (Jeannie Perez)
Date: Tue, 02 Aug 2011 15:11:05 -0700
Subject: Attached PEN to the Logbooks
Message-ID: <4E3875F9.9040004@stanford.edu>

Now you have a pen attached to the logbook (Drytek4, Innotec, Metalica 
and STS PECVD).
Jeannie
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/sts/attachments/20110802/01be3b0e/attachment.html>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: nperez.vcf
Type: text/x-vcard
Size: 346 bytes
Desc: not available
URL: <http://snf.stanford.edu/pipermail/sts/attachments/20110802/01be3b0e/attachment.vcf>

From dwnam at stanford.edu  Sun Aug 14 17:43:59 2011
From: dwnam at stanford.edu (Donguk Nam)
Date: Sun, 14 Aug 2011 17:43:59 -0700
Subject: STS Clean cycle started(EOM)
Message-ID: <CAE+TuhpZy07_CQT86xzG5rLg72cehYqZu3SFRpe0595TcKSoDg@mail.gmail.com>


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/sts/attachments/20110814/adce38d4/attachment.html>

From dinh at kaiamcorp.com  Thu Aug 18 13:24:45 2011
From: dinh at kaiamcorp.com (Dinh Ton)
Date: Thu, 18 Aug 2011 13:24:45 -0700
Subject: PECVD : cleaning cycle will start after I finish my run...
Message-ID: <CAL0T8yTBE8MnPaEUnmsBWvOgKpoicDpj9S7EVhbnY3DjOSQDSA@mail.gmail.com>

Hi,

After I've finished, it will have about 4.4um total thickness...  Will run
clean cycle on the tool.
If you around when etchback3 is done  -- please continue.

Thanks,
Dinh
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/sts/attachments/20110818/727abff1/attachment.html>

From ntayebi at stanford.edu  Fri Aug 19 16:39:54 2011
From: ntayebi at stanford.edu (Noureddine Tayebi)
Date: Fri, 19 Aug 2011 16:39:54 -0700 (PDT)
Subject: dep thick at 4.2 um
In-Reply-To: <200961847.723194.1313797187470.JavaMail.root@zm02.stanford.edu>
Message-ID: <289196773.723200.1313797194839.JavaMail.root@zm02.stanford.edu>

Hi All,

Thickness is at 4.2 um. Anyone will be using it for the remaining 3000 A or should I start the cleaning process? Last run was nitride. So no need to predep if you're doing nitride as well.

Thanks

Noureddine


From zzp at stanford.edu  Sat Aug 27 12:00:34 2011
From: zzp at stanford.edu (Zhiping Zhang)
Date: Sat, 27 Aug 2011 12:00:34 -0700 (PDT)
Subject: STS clean cycle started (EOM)
Message-ID: <1019484789.379686.1314471634633.JavaMail.root@zm01.stanford.edu>