PECVD : cleaning cycle will start after I finish my run...

Dinh Ton dinh at kaiamcorp.com
Thu Aug 18 13:24:45 PDT 2011


Hi,

After I've finished, it will have about 4.4um total thickness...  Will run
clean cycle on the tool.
If you around when etchback3 is done  -- please continue.

Thanks,
Dinh
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