PECVD : cleaning cycle will start after I finish my run...

Dinh Ton dinh at
Thu Aug 18 13:24:45 PDT 2011


After I've finished, it will have about 4.4um total thickness...  Will run
clean cycle on the tool.
If you around when etchback3 is done  -- please continue.

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <>

More information about the sts mailing list