dep thick at 4.2 um

Noureddine Tayebi ntayebi at stanford.edu
Fri Aug 19 16:39:54 PDT 2011


Hi All,

Thickness is at 4.2 um. Anyone will be using it for the remaining 3000 A or should I start the cleaning process? Last run was nitride. So no need to predep if you're doing nitride as well.

Thanks

Noureddine



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