STS pecvd clean cycle will be started after my run

Donguk Nam dwnam at
Tue Jul 5 17:41:47 PDT 2011

It is already over 4.0um and will be reaching 4.5um after my run.
Etchbak3 will be started.

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <>

More information about the sts mailing list