sts PECVD high compressive stress nitride / oxide recipe

Nikhil Apte npapte at
Thu Mar 17 16:57:19 PDT 2011


I am planning to deposit a high compressive stress nitride/oxide film on my
wafers to correct the wafer curvature. Can anyone help me with what recipe /
parameters I should use?

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <>

More information about the sts mailing list