sts PECVD high compressive stress nitride / oxide recipe

Nikhil Apte npapte at stanford.edu
Thu Mar 17 16:57:19 PDT 2011


Hi,

I am planning to deposit a high compressive stress nitride/oxide film on my
wafers to correct the wafer curvature. Can anyone help me with what recipe /
parameters I should use?

Thanks,
Nikhil
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