From nperez at stanford.edu Tue May 3 09:17:21 2011 From: nperez at stanford.edu (Jeannie Perez) Date: Tue, 03 May 2011 09:17:21 -0700 Subject: Status of STS PECVD Message-ID: <4DC02A91.1030305@stanford.edu> Hi Everyone, The clean cycle is being ran as we speak and the tests will follow with both frequencies. We should know if it's by 3PM today. Thanks for your patience, Jeannie -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: nperez.vcf Type: text/x-vcard Size: 346 bytes Desc: not available URL: From nperez at stanford.edu Tue May 3 15:21:53 2011 From: nperez at stanford.edu (Jeannie Perez) Date: Tue, 03 May 2011 15:21:53 -0700 Subject: STS PECVD is up Message-ID: <4DC08001.7050101@stanford.edu> High and low frequency oxide test good. Please run your own test. Did not run a nitride test. Jeannie -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: nperez.vcf Type: text/x-vcard Size: 346 bytes Desc: not available URL: From ylyang at stanford.edu Wed May 4 12:24:05 2011 From: ylyang at stanford.edu (Yongliang Yang) Date: Wed, 4 May 2011 12:24:05 -0700 (PDT) Subject: anyone who measured SiNx electric properties? In-Reply-To: <687754693.1092626.1304535444816.JavaMail.root@zm04.stanford.edu> Message-ID: <1822382970.1094037.1304537045444.JavaMail.root@zm04.stanford.edu> Hi, I use SiNx as dielectric layer between tow metal layers and want to know the electric properties of PECVD SiNx deposited by STS. Is there anyone who measured it and can share the result? Best, Yongliang From nperez at stanford.edu Fri May 6 15:28:59 2011 From: nperez at stanford.edu (Jeannie Perez) Date: Fri, 06 May 2011 15:28:59 -0700 Subject: Log sheets Need to be filled out correctly! Message-ID: <4DC4762B.8080105@stanford.edu> Hi Everyone, I need help from all Users to completely fill out the log sheets . With this information we would have a better understanding of what, why, or when did problems start occurring. Users are not completely filling out the log sheets. What you may think is minor, can be very important to maintenance, staff and you as an User. This even means the Date, Pressure, how many pellets added, what frequency used, what recipe used, what gases used, what film etched or cleaned ( oxide, nitride, resist) or What is the DC Bias reading on Drytek 4. I need you to completely fill out the log sheets or I will have to start disqualifying Users. For all the good Users, you can stop by the office and have some peanuts. Have a nice week-end, Jeannie -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: nperez.vcf Type: text/x-vcard Size: 346 bytes Desc: not available URL: From usharaghuram at gmail.com Fri May 6 21:40:15 2011 From: usharaghuram at gmail.com (Usha Raghuram) Date: Fri, 6 May 2011 21:40:15 -0700 Subject: STS Reservation released Message-ID: Released reservation for tomorrow from 8:00AM-10:30AM -------------- next part -------------- An HTML attachment was scrubbed... URL: From dwnam at stanford.edu Mon May 9 10:09:00 2011 From: dwnam at stanford.edu (Donguk Nam) Date: Mon, 9 May 2011 10:09:00 -0700 Subject: PECVD is free 2am to noon tomorrow Message-ID: Samples are not ready. Donguk -------------- next part -------------- An HTML attachment was scrubbed... URL: From dwnam at stanford.edu Mon May 9 23:54:57 2011 From: dwnam at stanford.edu (Donguk Nam) Date: Mon, 9 May 2011 23:54:57 -0700 Subject: Sts free until 2am Message-ID: Finished early. Donguk -------------- next part -------------- An HTML attachment was scrubbed... URL: From usharaghuram at gmail.com Wed May 11 13:52:02 2011 From: usharaghuram at gmail.com (Usha Raghuram) Date: Wed, 11 May 2011 13:52:02 -0700 Subject: Reservation released Message-ID: >From 14:00-18:00 today and 7:00Am -8:30AM on Friday. -------------- next part -------------- An HTML attachment was scrubbed... URL: From pradeep.nataraj at gmail.com Thu May 12 11:07:16 2011 From: pradeep.nataraj at gmail.com (Pradeep Nataraj) Date: Thu, 12 May 2011 11:07:16 -0700 Subject: Free today at 12:30 PM, sorry can't make it Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From chongxie at stanford.edu Sat May 14 13:18:41 2011 From: chongxie at stanford.edu (Chong Xie) Date: Sat, 14 May 2011 13:18:41 -0700 Subject: Low T PECVD Message-ID: Hi users, As the tool is all booked out, If someone is using the tool to deposit at low temperature, please let me know. I would like to share the hours to do a short run. Thanks. chong -------------- next part -------------- An HTML attachment was scrubbed... URL: From chienyuc at stanford.edu Sun May 15 22:50:54 2011 From: chienyuc at stanford.edu (Chien-Yu Chen) Date: Sun, 15 May 2011 22:50:54 -0700 (PDT) Subject: sts reservation release Mon 5/16 2030-2400 Message-ID: <1979826093.224231.1305525054504.JavaMail.root@zm03.stanford.edu> Sample will not be ready from upstream. From dinh at kaiamcorp.com Thu May 19 19:35:49 2011 From: dinh at kaiamcorp.com (Dinh Ton) Date: Thu, 19 May 2011 19:35:49 -0700 Subject: Chamber Cleaning Message-ID: Hi y'all, I am starting to clean the chamber. If you happen to be nearby STS PECVD, please help and continue with the clean. Thanks, Dinh -------------- next part -------------- An HTML attachment was scrubbed... URL: From dinh at kaiamcorp.com Thu May 19 19:52:41 2011 From: dinh at kaiamcorp.com (Dinh Ton) Date: Thu, 19 May 2011 19:52:41 -0700 Subject: Status of STS PECVD In-Reply-To: <4DC02A91.1030305@stanford.edu> References: <4DC02A91.1030305@stanford.edu> Message-ID: Hi, I just started the clean cycle. If anyone is around the lab late tonight, please help and continue the process. Thanks, Dinh On Tue, May 3, 2011 at 9:17 AM, Jeannie Perez wrote: > Hi Everyone, > The clean cycle is being ran as we speak and the tests will follow with > both frequencies. We should know if it's by 3PM today. > Thanks for your patience, > Jeannie > -------------- next part -------------- An HTML attachment was scrubbed... URL: From dinh at kaiamcorp.com Fri May 20 09:00:56 2011 From: dinh at kaiamcorp.com (Dinh Ton) Date: Fri, 20 May 2011 09:00:56 -0700 Subject: Status of STS PECVD In-Reply-To: <4DC02A91.1030305@stanford.edu> References: <4DC02A91.1030305@stanford.edu> Message-ID: Hi Jeannie, I put STS in cleaning mode with "etchback3" not sure how far it got after I left. Could you please check for me? Also, during my short run (HF/LF cycles), the HF was out of tune for a few cycle and the plasma wasn't on. I guess it might be that the chamber is a bit dirty. But overall the coating comes out okie. Dinh From chienyuc at stanford.edu Fri May 20 17:33:40 2011 From: chienyuc at stanford.edu (Chien-Yu Chen) Date: Fri, 20 May 2011 17:33:40 -0700 (PDT) Subject: sts PECVD reservation release 5/20 2000-2400 Message-ID: <55014685.392545.1305938020176.JavaMail.root@zm03.stanford.edu> Sorry for the late notice; sample will not be ready at that time. From ntayebi at stanford.edu Tue May 24 11:50:13 2011 From: ntayebi at stanford.edu (Noureddine Tayebi) Date: Tue, 24 May 2011 11:50:13 -0700 (PDT) Subject: Will be starting a clean ~ 12:30 PM after I finish my run In-Reply-To: Message-ID: <331349905.511622.1306263013364.JavaMail.root@zm02.stanford.edu> Hi all, I will reach 4.5 um after my run (end ~ 12:30 PM) and I will start chamber cleaning. The etchback3 step will be done around 4 PM. Can anyone pick it up after that? Thanks Noureddine From ntayebi at stanford.edu Tue May 24 15:28:21 2011 From: ntayebi at stanford.edu (Noureddine Tayebi) Date: Tue, 24 May 2011 15:28:21 -0700 (PDT) Subject: Will be starting a clean ~ 12:30 PM after I finish my run In-Reply-To: <331349905.511622.1306263013364.JavaMail.root@zm02.stanford.edu> Message-ID: <1815910980.521925.1306276101044.JavaMail.root@zm02.stanford.edu> Hi Everyone, I will not be able to continue with the clean up process. Can someone take over? It's basically half way at this point. Thanks Noureddine ----- Original Message ----- From: "Noureddine Tayebi" To: sts at snf.stanford.edu Sent: Tuesday, May 24, 2011 11:50:13 AM Subject: Will be starting a clean ~ 12:30 PM after I finish my run Hi all, I will reach 4.5 um after my run (end ~ 12:30 PM) and I will start chamber cleaning. The etchback3 step will be done around 4 PM. Can anyone pick it up after that? Thanks Noureddine From ntayebi at stanford.edu Wed May 25 08:42:20 2011 From: ntayebi at stanford.edu (Noureddine Tayebi) Date: Wed, 25 May 2011 08:42:20 -0700 (PDT) Subject: Last user did not turn on the Ar purge key In-Reply-To: <1815910980.521925.1306276101044.JavaMail.root@zm02.stanford.edu> Message-ID: <1243070458.541288.1306338140456.JavaMail.root@zm02.stanford.edu> Hi Everyone, I came this morning to check if the cleaning was carried and see if it was finished. Indeed it was finished by dton (coral name) and then used by two other users. the last user forgot to turn the Ar purge key up while aborting the 16 hr warm up and it seems it was like that for over two hours. I'm not sure how this will affect future depositions but please make sure you do do it as it is an important step to keep chamber and deposition clean. Thanks Noureddine From ntayebi at stanford.edu Wed May 25 16:24:51 2011 From: ntayebi at stanford.edu (Noureddine Tayebi) Date: Wed, 25 May 2011 16:24:51 -0700 (PDT) Subject: low stress PECVD oxide film In-Reply-To: <1243070458.541288.1306338140456.JavaMail.root@zm02.stanford.edu> Message-ID: <571751449.572200.1306365891458.JavaMail.root@zm02.stanford.edu> Hi everyone, I was wondering if anyone has a modified oxide recipe that yields low stress oxide PECVD. I'm getting 120 MPa (compressive) with the standard recipe. Thanks Noureddine