From zzp at stanford.edu Wed Nov 2 01:21:13 2011 From: zzp at stanford.edu (Zhiping Zhang) Date: Wed, 2 Nov 2011 01:21:13 -0700 (PDT) Subject: clean cycle almost done Message-ID: <43156071.1500759.1320222073509.JavaMail.root@zm01.stanford.edu> only the last IPA wipe and o2decum are left. Please plan for the time if you are using it this morning. Thanks, Zhiping From mehdij at stanford.edu Wed Nov 2 17:03:34 2011 From: mehdij at stanford.edu (Mehdi Javanmard) Date: Wed, 2 Nov 2011 17:03:34 -0700 (PDT) Subject: sts pecvd cleaning completed Message-ID: <1848972057.1550929.1320278614989.JavaMail.root@zm03.stanford.edu> final ipa wipe, final 02 descum, and npredep completed. Mehdi -------------- next part -------------- An HTML attachment was scrubbed... URL: From ntayebi at stanford.edu Thu Nov 3 09:13:03 2011 From: ntayebi at stanford.edu (Noureddine Tayebi) Date: Thu, 3 Nov 2011 09:13:03 -0700 (PDT) Subject: running an O2 descum to clean up some junk on the plate Message-ID: <1913071640.1864971.1320336783222.JavaMail.root@zm02.stanford.edu> Hi everyone, I found some junk on the STS plate which might have come from a melted glove. So I'm running a 30 min O2 decum. If you're planning on using it, just enable over me whenever you do. Noureddine From jperez at snf.stanford.edu Fri Nov 4 14:32:09 2011 From: jperez at snf.stanford.edu (Jeannie Perez) Date: Fri, 04 Nov 2011 14:32:09 -0700 Subject: Fwd: Comment sts SNF 2011-11-04 09:57:59: Dep rate after bottle change was lower than normal In-Reply-To: <20111104165801.0ACB456F4@smtp-unencrypted.stanford.edu> References: <20111104165801.0ACB456F4@smtp-unencrypted.stanford.edu> Message-ID: <4EB459D9.6070708@snf.stanford.edu> Please read below............. -------- Original Message -------- Subject: Comment sts SNF 2011-11-04 09:57:59: Dep rate after bottle change was lower than normal Date: Fri, 4 Nov 2011 09:58:00 -0700 From: jperez at snf.stanford.edu To: sts-pcs at snf.stanford.edu Dep. rate for Low Frequency oxide is lower than normal (341A/min). Index of refraction was normal 1.477. I switched 2% silane bottle. -------------- next part -------------- An HTML attachment was scrubbed... URL: From chen0622 at yahoo.com Wed Nov 9 12:08:24 2011 From: chen0622 at yahoo.com (c.c.) Date: Wed, 9 Nov 2011 12:08:24 -0800 (PST) Subject: STS PECVD free now, finished early Message-ID: <1320869304.53548.YahooMailNeo@web161604.mail.bf1.yahoo.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: From wslee at stanford.edu Fri Nov 18 09:59:34 2011 From: wslee at stanford.edu (Scott Lee) Date: Fri, 18 Nov 2011 09:59:34 -0800 Subject: Low temperature rules for sts Message-ID: I normally deposit oxide in sts at 350C but I am interested in depositing at lower temperatures. What is the lowest temperature I can deposit at without doing the chamber clean? Can I go any lower than 350? Thanks, Scott -------------- next part -------------- An HTML attachment was scrubbed... URL: From dinh at kaiamcorp.com Sun Nov 20 15:44:39 2011 From: dinh at kaiamcorp.com (Dinh Ton) Date: Sun, 20 Nov 2011 15:44:39 -0800 Subject: New Cleaning cycle ... Message-ID: New cleaning cycle started .. please continue if you have time -------------- next part -------------- An HTML attachment was scrubbed... URL: From zzp at stanford.edu Sat Nov 26 01:15:50 2011 From: zzp at stanford.edu (Zhiping Zhang) Date: Sat, 26 Nov 2011 01:15:50 -0800 (PST) Subject: clean cycle started Message-ID: <719364047.140280.1322298950090.JavaMail.root@zm01.stanford.edu> will come in tomorrow to finish it. thanks, Zhiping From pradeep.nataraj at gmail.com Tue Nov 29 20:09:25 2011 From: pradeep.nataraj at gmail.com (Pradeep Nataraj) Date: Tue, 29 Nov 2011 20:09:25 -0800 Subject: Chamber has lot of particles starting the Clean Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: