From ylyang at stanford.edu  Sat Oct  1 11:14:46 2011
From: ylyang at stanford.edu (Yongliang Yang)
Date: Sat, 1 Oct 2011 11:14:46 -0700 (PDT)
Subject: STS clean cycle started (EOM)
In-Reply-To: <1019484789.379686.1314471634633.JavaMail.root@zm01.stanford.edu>
Message-ID: <741729460.1091993.1317492886469.JavaMail.root@zm04.stanford.edu>



From ntayebi at stanford.edu  Tue Oct  4 11:03:44 2011
From: ntayebi at stanford.edu (Noureddine Tayebi)
Date: Tue, 4 Oct 2011 11:03:44 -0700 (PDT)
Subject: sts cleaning cycle started
Message-ID: <1407232856.850342.1317751424285.JavaMail.root@zm02.stanford.edu>



From ntayebi at stanford.edu  Tue Oct  4 15:50:21 2011
From: ntayebi at stanford.edu (Noureddine Tayebi)
Date: Tue, 4 Oct 2011 15:50:21 -0700 (PDT)
Subject: sts cleaning cycle started
In-Reply-To: <1407232856.850342.1317751424285.JavaMail.root@zm02.stanford.edu>
Message-ID: <985001788.865363.1317768621089.JavaMail.root@zm02.stanford.edu>

did all cleaning steps and just started npredep. I won't be there when it ends. So if any one is arround in an hour or so, please abort the 16 h countdown and turn off Ar.

Thanks

Noureddine 

From: "Noureddine Tayebi" <ntayebi at stanford.edu>
To: sts at snf.stanford.edu
Sent: Tuesday, October 4, 2011 11:03:44 AM
Subject: sts cleaning cycle started



From ntayebi at stanford.edu  Tue Oct 11 13:22:57 2011
From: ntayebi at stanford.edu (Noureddine Tayebi)
Date: Tue, 11 Oct 2011 13:22:57 -0700 (PDT)
Subject: STS cleaning cycle started
Message-ID: <23833822.1086641.1318364577793.JavaMail.root@zm02.stanford.edu>



From ntayebi at stanford.edu  Tue Oct 18 11:03:27 2011
From: ntayebi at stanford.edu (Noureddine Tayebi)
Date: Tue, 18 Oct 2011 11:03:27 -0700 (PDT)
Subject: STS cleaning cycle started -- eom
Message-ID: <2094534666.1316882.1318961007522.JavaMail.root@zm02.stanford.edu>



From Farid.Zuberi at grandisinc.com  Tue Oct 18 13:46:30 2011
From: Farid.Zuberi at grandisinc.com (Farid Zuberi)
Date: Tue, 18 Oct 2011 13:46:30 -0700
Subject: STS Cleaning Cycle started !!! 
Message-ID: <BFDFF89148107C419A619E4A06A1475D19DFB3D8B8@EXVMBX020-3.exch020.serverdata.net>



From jperez at snf.stanford.edu  Wed Oct 19 15:18:38 2011
From: jperez at snf.stanford.edu (Jeannie Perez)
Date: Wed, 19 Oct 2011 15:18:38 -0700
Subject: Fwd: Comment sts SNF 2011-10-19 15:08:43: Test wafers (2) good
In-Reply-To: <20111019220844.9796C554F@smtp-unencrypted.stanford.edu>
References: <20111019220844.9796C554F@smtp-unencrypted.stanford.edu>
Message-ID: <4E9F4CBE.4080905@snf.stanford.edu>



-------- Original Message --------
Subject: 	Comment sts SNF 2011-10-19 15:08:43: Test wafers (2) good
Date: 	Wed, 19 Oct 2011 15:08:44 -0700
From: 	jperez at snf.stanford.edu
To: 	sts-pcs at snf.stanford.edu



Back tw 406A/min Avg. thickness 1044, IR 1.475
Front tw 413A /min Avg thickness 1062, IR 1.48739
See log book to review data



-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/sts/attachments/20111019/1cdfa12a/attachment.html>

From nperez at stanford.edu  Fri Oct 28 13:09:01 2011
From: nperez at stanford.edu (Jeannie Perez)
Date: Fri, 28 Oct 2011 13:09:01 -0700
Subject: Test after Ammonia back on line.for STS PECVD
Message-ID: <4EAB0BDD.5030402@stanford.edu>

Ammonia bottle passed leak check.

I ran 2 test wafers and both were good, dep rate for front tw was 94.5 angstroms /minute and back tw 94A/min
Jeannie


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/sts/attachments/20111028/60fe4bdd/attachment.html>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: nperez.vcf
Type: text/x-vcard
Size: 346 bytes
Desc: not available
URL: <http://snf.stanford.edu/pipermail/sts/attachments/20111028/60fe4bdd/attachment.vcf>

From clchang6 at stanford.edu  Sat Oct 29 21:12:32 2011
From: clchang6 at stanford.edu (Chienliu Chang)
Date: Sat, 29 Oct 2011 21:12:32 -0700
Subject: STS reservation cancellation_Chienliu
Message-ID: <D420349D931A49E5A4BDC97CDB69FD83@corp.cusa.canon.com>

Dear all STS users,

I deleted my reservation on Sunday and Monday.
I hope it would be helpful for you.
Thanks.
Sincerely,
Chienliu
-------------------------------------------------
Chienliu Chang, Ph.D.

Khuri-Yakub Laboratory
Edward L. Ginzton Laboratory, Box 125
Center for Nanoscale Science & Engineering, room 101
Stanford University
348 Via Pueblo, Stanford, CA 94305-4088 
 
Office: 650-725-2265
Mobile: 650-521-3007
Email: clchang6 at stanford.edu
      clchang6 at ntu.edu.tw
-------------------------------------------------