Test after Ammonia back on line.for STS PECVD

Jeannie Perez nperez at stanford.edu
Fri Oct 28 13:09:01 PDT 2011


Ammonia bottle passed leak check.

I ran 2 test wafers and both were good, dep rate for front tw was 94.5 angstroms /minute and back tw 94A/min
Jeannie


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