From ntayebi at stanford.edu  Wed Sep  7 14:32:02 2011
From: ntayebi at stanford.edu (Noureddine Tayebi)
Date: Wed, 7 Sep 2011 14:32:02 -0700 (PDT)
Subject: Getting a pressure tolerance error on the STS and can't start
 recipes
Message-ID: <1823208010.57996.1315431122747.JavaMail.root@zm02.stanford.edu>

Hi Everyone,

I'm getting a pressure tolerance error and I'm not able to start any of the depositions. Tried various recipes but same problem. Tried to vent and pump down again but problem persisted.  Has anyone encountered this problem before and was able to resolve it?

Thanks

Noureddine


From dinh at kaiamcorp.com  Wed Sep  7 15:01:35 2011
From: dinh at kaiamcorp.com (Dinh Ton)
Date: Wed, 7 Sep 2011 15:01:35 -0700
Subject: Getting a pressure tolerance error on the STS and can't start recipes
In-Reply-To: <1823208010.57996.1315431122747.JavaMail.root@zm02.stanford.edu>
References: <1823208010.57996.1315431122747.JavaMail.root@zm02.stanford.edu>
Message-ID: <CAL0T8yTzrsLL+ELsvFA4hzjMeQXSd5H8oB0ULMg2_iLy2JqY+Q@mail.gmail.com>

Last time I'd seen this -- the problem was in the nitrogen line (near
the Ar gas switch).
Somehow, someone changed the setting on this and it was way too much flow &
machine can't pump down.

Dinh

On 9/7/11, Noureddine Tayebi <ntayebi at stanford.edu> wrote:
> Hi Everyone,
>
> I'm getting a pressure tolerance error and I'm not able to start any of the
> depositions. Tried various recipes but same problem. Tried to vent and pump
> down again but problem persisted.  Has anyone encountered this problem
> before and was able to resolve it?
>
> Thanks
>
> Noureddine
>


From chen0622 at yahoo.com  Thu Sep 22 10:37:36 2011
From: chen0622 at yahoo.com (c.c.)
Date: Thu, 22 Sep 2011 10:37:36 -0700 (PDT)
Subject: STS PECVD free now, start early, finish early
Message-ID: <1316713056.53224.YahooMailNeo@web161617.mail.bf1.yahoo.com>


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From jprovine at stanford.edu  Thu Sep 22 15:03:51 2011
From: jprovine at stanford.edu (J Provine)
Date: Thu, 22 Sep 2011 15:03:51 -0700
Subject: sts free 16:00
Message-ID: <CAOKRUakQDCwLephqyC3D7VumiewyJ0sddUXtqPEiL5GmR3nuqQ@mail.gmail.com>

sorry for late notice.
j
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From ylyang at stanford.edu  Wed Sep 28 16:14:39 2011
From: ylyang at stanford.edu (Yongliang Yang)
Date: Wed, 28 Sep 2011 16:14:39 -0700 (PDT)
Subject: STS PECVD booked from 13:00 Sept. 29 to 08:00 Sept.30
In-Reply-To: <1316713056.53224.YahooMailNeo@web161617.mail.bf1.yahoo.com>
Message-ID: <1563969038.966549.1317251679068.JavaMail.root@zm04.stanford.edu>

Hi, STS PECVD users


I have booked the STS from 13:30 Sept. 29  to 8:00 Sept. 30 because I need to do the special clean to keep my wafers from gold contamination. As you may know, the special clean takes about 10 hours. My deposition will take about 5 hours, and after that it almost 4.5um, so I need to clean it for the next user.

Please let me know If you want to use it during my reservation, I can change it. Sorry for take such a long reservation. 

to Jeannie, I will go to your office tomorrow morning to get the check list.
  
Best,
Yongliang


From ylyang at stanford.edu  Wed Sep 28 21:21:13 2011
From: ylyang at stanford.edu (Yongliang Yang)
Date: Wed, 28 Sep 2011 21:21:13 -0700 (PDT)
Subject: STS PECVD released booked from 13:00 Sept. 29 to 08:00 Sept.30
In-Reply-To: <1563969038.966549.1317251679068.JavaMail.root@zm04.stanford.edu>
Message-ID: <1164324401.977027.1317270073411.JavaMail.root@zm04.stanford.edu>

Sorry to spam, I have changed my reservation to the weekend.

Best,
Yongliang

----- Original Message -----
From: "Yongliang Yang" <ylyang at stanford.edu>
To: sts at snf.stanford.edu
Cc: jperez at snf.stanford.edu
Sent: Wednesday, September 28, 2011 4:14:39 PM
Subject: STS PECVD booked from 13:00 Sept. 29 to 08:00 Sept.30

Hi, STS PECVD users


I have booked the STS from 13:30 Sept. 29  to 8:00 Sept. 30 because I need to do the special clean to keep my wafers from gold contamination. As you may know, the special clean takes about 10 hours. My deposition will take about 5 hours, and after that it almost 4.5um, so I need to clean it for the next user.

Please let me know If you want to use it during my reservation, I can change it. Sorry for take such a long reservation. 

to Jeannie, I will go to your office tomorrow morning to get the check list.
  
Best,
Yongliang