Getting a pressure tolerance error on the STS and can't start recipes

Noureddine Tayebi ntayebi at stanford.edu
Wed Sep 7 14:32:02 PDT 2011


Hi Everyone,

I'm getting a pressure tolerance error and I'm not able to start any of the depositions. Tried various recipes but same problem. Tried to vent and pump down again but problem persisted.  Has anyone encountered this problem before and was able to resolve it?

Thanks

Noureddine



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