Getting a pressure tolerance error on the STS and can't start recipes
dinh at kaiamcorp.com
Wed Sep 7 15:01:35 PDT 2011
Last time I'd seen this -- the problem was in the nitrogen line (near
the Ar gas switch).
Somehow, someone changed the setting on this and it was way too much flow &
machine can't pump down.
On 9/7/11, Noureddine Tayebi <ntayebi at stanford.edu> wrote:
> Hi Everyone,
> I'm getting a pressure tolerance error and I'm not able to start any of the
> depositions. Tried various recipes but same problem. Tried to vent and pump
> down again but problem persisted. Has anyone encountered this problem
> before and was able to resolve it?
More information about the sts