Getting a pressure tolerance error on the STS and can't start recipes

Dinh Ton dinh at kaiamcorp.com
Wed Sep 7 15:01:35 PDT 2011


Last time I'd seen this -- the problem was in the nitrogen line (near
the Ar gas switch).
Somehow, someone changed the setting on this and it was way too much flow &
machine can't pump down.

Dinh

On 9/7/11, Noureddine Tayebi <ntayebi at stanford.edu> wrote:
> Hi Everyone,
>
> I'm getting a pressure tolerance error and I'm not able to start any of the
> depositions. Tried various recipes but same problem. Tried to vent and pump
> down again but problem persisted.  Has anyone encountered this problem
> before and was able to resolve it?
>
> Thanks
>
> Noureddine
>



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