STS PECVD released booked from 13:00 Sept. 29 to 08:00 Sept.30
ylyang at stanford.edu
Wed Sep 28 21:21:13 PDT 2011
Sorry to spam, I have changed my reservation to the weekend.
----- Original Message -----
From: "Yongliang Yang" <ylyang at stanford.edu>
To: sts at snf.stanford.edu
Cc: jperez at snf.stanford.edu
Sent: Wednesday, September 28, 2011 4:14:39 PM
Subject: STS PECVD booked from 13:00 Sept. 29 to 08:00 Sept.30
Hi, STS PECVD users
I have booked the STS from 13:30 Sept. 29 to 8:00 Sept. 30 because I need to do the special clean to keep my wafers from gold contamination. As you may know, the special clean takes about 10 hours. My deposition will take about 5 hours, and after that it almost 4.5um, so I need to clean it for the next user.
Please let me know If you want to use it during my reservation, I can change it. Sorry for take such a long reservation.
to Jeannie, I will go to your office tomorrow morning to get the check list.
More information about the sts