From nperez at stanford.edu Fri Apr 6 14:38:36 2012 From: nperez at stanford.edu (Jeannie Perez) Date: Fri, 06 Apr 2012 14:38:36 -0700 Subject: STS PECVD USERS, NO MORE TAPPING TO LIFT or close LID Message-ID: <4F7F625C.9060201@stanford.edu> Hi Everyone, Jim Haydon replaced leaky connector and also adjusted the lid so that it won't jerk and release particles when opening or closing the Lid. It is moving very slowly so that it works properly. Once vented, press on both blue buttons until the lid is completely up. Once F1 is pressed to "close lid", press on both blue buttons until lid is closed. NO TAPPING!!! Any questions let us know, Jeannie -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: nperez.vcf Type: text/x-vcard Size: 346 bytes Desc: not available URL: From oguz.h.elibol at intel.com Fri Apr 6 14:58:18 2012 From: oguz.h.elibol at intel.com (Elibol, Oguz H) Date: Fri, 6 Apr 2012 21:58:18 +0000 Subject: Started the clean cycle at 1:40 pm EOM Message-ID: <0BB4DB20A3026C41BBAC8A743D0791B70E5D33@ORSMSX103.amr.corp.intel.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: From nperez at stanford.edu Fri Apr 6 15:24:45 2012 From: nperez at stanford.edu (Jeannie Perez) Date: Fri, 06 Apr 2012 15:24:45 -0700 Subject: WARNING! WARNING! Message-ID: <4F7F6D2D.7070408@stanford.edu> Sorry, but I have to warn you that the 2% silane bottle pressure is low (262). This may not last the week-end, depending on how many users and cycles ran. If you see that the 2% flow start to drop, shut STS down. Once the bottle is changed we will be down for a 24 hour leak check. Again sorry, Jeannie Here is the link to check 2% silane gas pressure: LINE #27 > http://172.24.101.35/wgrwebapp/Default_WGR.aspx -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: nperez.vcf Type: text/x-vcard Size: 346 bytes Desc: not available URL: From pradeep.nataraj at gmail.com Tue Apr 10 19:07:30 2012 From: pradeep.nataraj at gmail.com (Pradeep Nataraj) Date: Tue, 10 Apr 2012 19:07:30 -0700 Subject: chamber was dirty clean started Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From zzp at stanford.edu Sun Apr 15 02:44:38 2012 From: zzp at stanford.edu (Zhiping Zhang) Date: Sun, 15 Apr 2012 02:44:38 -0700 (PDT) Subject: clean cycle started [eom] In-Reply-To: <1775256031.36883082.1332462042641.JavaMail.root@zm03.stanford.edu> Message-ID: <326511379.136168164.1334483078884.JavaMail.root@zm01.stanford.edu> From suyog at stanford.edu Sat Apr 21 13:23:38 2012 From: suyog at stanford.edu (Suyog Gupta) Date: Sat, 21 Apr 2012 13:23:38 -0700 Subject: STS today Message-ID: Hey Pradeep, I see that you have STS reserved till afternoon tomorrow. Do you think it might be possible for you to let me use the system this evening for a quick 40nm oxide deposition? Please let me know. Thanks, Suyog From suyog at stanford.edu Sat Apr 21 20:56:11 2012 From: suyog at stanford.edu (Suyog Gupta) Date: Sat, 21 Apr 2012 20:56:11 -0700 Subject: clean cycle started , 9pm (4/21) [EOM] Message-ID: From ylyang at stanford.edu Fri Apr 27 13:54:29 2012 From: ylyang at stanford.edu (Yongliang Yang) Date: Fri, 27 Apr 2012 13:54:29 -0700 (PDT) Subject: STS Clean cycle started In-Reply-To: Message-ID: <1283418505.59557619.1335560069641.JavaMail.root@zm04.stanford.edu> Hi,all Special clean cycle has been started. To previous user, please let me know when did you start the clean cycle. Best, Yongliang