STS PECVD USERS, NO MORE TAPPING TO LIFT or close LID

Jeannie Perez nperez at stanford.edu
Fri Apr 6 14:38:36 PDT 2012


Hi Everyone,
Jim Haydon replaced leaky connector and also adjusted the lid so that it 
won't jerk and release particles when opening or
closing the Lid. It is moving very slowly so that it works properly. 
Once vented, press on both blue buttons until the lid is
completely up. Once F1 is pressed to "close lid",  press on both blue 
buttons until lid is closed.  NO TAPPING!!!
Any questions let us know,
Jeannie
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