From nperez at stanford.edu Fri Feb 17 13:40:56 2012 From: nperez at stanford.edu (Jeannie Perez) Date: Fri, 17 Feb 2012 13:40:56 -0800 Subject: Silane bottle change under leak check. Message-ID: <4F3EC968.2030002@stanford.edu> FYI, STS PECVD is now operating with only one bottle of Silane gas. We use to have the spare bottle leak checked and ready to go by just switching toggles to activate the back-up Silane gas bottle when the first bottles was reading low pressure (running out). We no longer have this capability. We will now have to change the silane gas bottle and do a 24 hour leak-check. Today we just turned on the Silane gas for STS PECVD. I cannot complete the clean without Silane gas which is under leak check. On Tuesday 2-21-2012 if it passes leak check, I'll be able to finish off the cleaning cycle and run my tests. If all goes well STS PECVD should be up by noon 2-21-2-12. Best Regards and a wonderful Holiday, Jeannie -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: nperez.vcf Type: text/x-vcard Size: 346 bytes Desc: not available URL: