From chienyuc at stanford.edu Wed Mar 7 14:38:37 2012 From: chienyuc at stanford.edu (Chien-Yu Chen) Date: Wed, 7 Mar 2012 14:38:37 -0800 (PST) Subject: reservation released 3/7 Wed 2000-2200 In-Reply-To: <1099575794.23044307.1331159911995.JavaMail.root@zm03.stanford.edu> Message-ID: <1518463843.23044527.1331159917329.JavaMail.root@zm03.stanford.edu> Sample won't be ready tonight. From oguz.h.elibol at intel.com Wed Mar 7 14:39:53 2012 From: oguz.h.elibol at intel.com (Elibol, Oguz H) Date: Wed, 7 Mar 2012 22:39:53 +0000 Subject: STS PECVD Thickness Limit Reached - Starting a Clean Message-ID: <0BB4DB20A3026C41BBAC8A743D0791B70B4CF9@ORSMSX103.amr.corp.intel.com> Hi All, STS needs a clean cycle, I will start it after my deposition (clean cycle start time ~4.30 pm). Oguz -------------- next part -------------- An HTML attachment was scrubbed... URL: From pradeep.nataraj at gmail.com Mon Mar 12 17:00:07 2012 From: pradeep.nataraj at gmail.com (Pradeep Nataraj) Date: Mon, 12 Mar 2012 17:00:07 -0700 Subject: STS is free and clean Message-ID: <72EC24F0-6D03-4C0C-A0E2-27B97881B472@gmail.com> Dear Next user, Please remove the special process sign on STS PECVD. I finished up the clean. I was going to do my process, but something came up and I had to take off. It is good to go now. Sorry for not taking the sign off from the tool. Pnataraj From chienyuc at stanford.edu Thu Mar 22 17:20:42 2012 From: chienyuc at stanford.edu (Chien-Yu Chen) Date: Thu, 22 Mar 2012 17:20:42 -0700 (PDT) Subject: clean cycle started Message-ID: <1775256031.36883082.1332462042641.JavaMail.root@zm03.stanford.edu> From chienyuc at stanford.edu Fri Mar 30 19:25:07 2012 From: chienyuc at stanford.edu (Chien-Yu Chen) Date: Fri, 30 Mar 2012 19:25:07 -0700 (PDT) Subject: sts clean cycle started In-Reply-To: <939705088.43312497.1333160618123.JavaMail.root@zm03.stanford.edu> Message-ID: <1686072722.43312989.1333160707088.JavaMail.root@zm03.stanford.edu> Ran low frequency oxide and the film quality and thickness was fine. Clean cycle started. chienyuc